Ion Beam Source for Low Energy Ion-Neutral Crossed-Beam Study
Ion Beam Source for Low Energy Ion-Neutral Crossed-Beam Study
复制标题
用于低能离子中性交叉束研究的离子束源
DOI：
10.1143/jjap.12.1
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发表时间：
1973
期刊：
影响因子：
--
通讯作者：
T. Arikawa
中科院分区：
文献类型：
--
作者：
T. Mochizuki;T. Arikawa
本文介绍了一种用于离子中性散射实验研究的离子源。离子源提供能量从几十eV到1 eV或更小的质量选择离子束，并且在高能量下输送10- 9A的离子电流，在低能量下输送10-12 A的离子电流。离子源主要由电子碰撞电离器、射频四极滤质器和减速透镜系统组成。在rf四极质量过滤器的前面和后面的传输透镜用于最大化到随后的减速透镜的传输电流。光束特性连同最佳操作条件。文中还介绍了弹性散射的初步实验结果。
An ion source for studies of ion-neutral scattering experiments is described. The ion source provides a mass selected ion beam of energies from several tens of eV to 1 eV or less, and delivers ion currents of 10-9 A at a high energy and 10-12 A at a low energy. The ion source consists mainly of an ionizer of electron impact, an rf quadrupole mass filter and a deceleration lens system. Transport lenses in front of and behind the rf quadrupole mass filter serve to maximize the transmission current to the subsequent deceleration lens. Beam properties together with optimum operating conditions are presented. Preliminary experimental results of elastic scattering are also presented.