Preparation and Characterization of Sol-Gel Derived Heteroepitaxial LiNbO 3 and LiTaO 3 Thin Films
Preparation and Characterization of Sol-Gel Derived Heteroepitaxial LiNbO 3 and LiTaO 3 Thin Films
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溶胶-凝胶法异质外延LiNbO 3 和LiTaO 3 薄膜的制备与表征
DOI：
10.1557/proc-310-293
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发表时间：
1993
期刊：
影响因子：
--
通讯作者：
K. Nashimoto
中科院分区：
文献类型：
--
作者：
K. Nashimoto
以2-甲氧基乙醇为前驱体，采用溶胶-凝胶法在蓝宝石衬底上制备了无取向差的致密LiNbO 3薄膜。在700°C下退火的外延LiNbO 3薄膜是透明的，其折射率接近于体单晶的折射率。采用该工艺在蓝宝石衬底上成功地生长出了具有单一取向的透明钽酸锂薄膜。在蓝宝石（110）衬底上外延生长的LiNbO 3和LiTaO 3薄膜经700°C退火后，X射线摇摆曲线半高宽均小于0.4 °。
Dense epitaxial LiNbO 3 thin films without any misoriented plane on sapphire substrates were obtained with a sol-gel process utilizing 2-methoxyethanol based metal alkoxide precursors without pre-hydrolysis and rapid thermal annealing. Epitaxial LiNbO 3 films annealed at 700°C were transparent and showed refractive indices close to bulk single crystal values. Epitaxial and transparent LiTaO 3 films crystallized successfully on sapphire substrates with single orientations with the present process. X-ray rocking curve full widths at half maximum of epitaxial LiNbO 3 and LiTaO 3 films on sapphire (110) substrates and annealed at 700°C were less than 0.4 degree.