Impact of the Density and Oxygen Concentration of Initial Amorphous Carbon on Layer Exchange of Multilayer Graphene
Impact of the Density and Oxygen Concentration of Initial Amorphous Carbon on Layer Exchange of Multilayer Graphene
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DOI：
10.1021/acs.cgd.2c01083
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发表时间：
2022-11
期刊：
影响因子：
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通讯作者：
H. Murata;K. Toko;K. Murakami;M. Nagao
中科院分区：
文献类型：
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作者：
H. Murata;K. Toko;K. Murakami;M. Nagao
非晶碳（a-C）的层交换（LE）是在绝缘衬底上制备高质量多层石墨烯（MLG）的一种很有前途的方法。通过控制a-C溅射气压（Pa-C），研究了初始a-C性质对LE-MLG生长温度和晶体质量的影响。X射线反射率和X射线光电子能谱分析表明，随着Pa-C含量的增加，a-C膜中的O浓度增加，a-C密度降低。LE发生在600 °C的最低温度下，反映了a-C的较低密度和O浓度。拉曼光谱结果表明，随着Pa-C含量的增加，LE-MLG的晶体质量提高。基于我们的研究结果，我们制定了在LE技术的a-C性能的指导方针，以降低生长温度，提高MLG的晶体质量。
Layer exchange (LE) of amorphous carbon (a-C) is a promising method for fabricating high-quality multilayer graphene (MLG) on insulating substrates. We investigated the effects of initial a-C properties on the growth temperature and crystal quality of LE-MLG by controlling the a-C sputtering pressure (Pa-C). X-ray reflectivity and X-ray photoelectron spectroscopy revealed that the a-C density decreased and the O concentration in the a-C film increased with increasingPa-C. LE occurred at the lowest temperature of 600 °C, reflecting a lower density and O concentration of a-C. Raman spectroscopy results showed that the crystal quality of LE-MLG improved with increasingPa-C. Based on our results, we developed guidelines for the a-C properties in the LE technique to reduce the growth temperature and improve the crystal quality of MLG.