The era of silicon MEMS microphone and look beyond

The era of silicon MEMS microphone and look beyond
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硅MEMS麦克风时代及其展望

DOI:
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发表时间:
2015
期刊:
International Conference on Solid-State Sensors, Actuators and Microsystems
影响因子:
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通讯作者:
J. Tao
J. Tao
中科院分区:
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文献类型:
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作者:
Zhe Wang;Q. Zou;Qinglin Song;J. Tao

文献摘要

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经过长期孵化最初用于微型助听器应用,硅电容麦克风在12年前被应用于手机应用,并从那时起爆炸性地发展成为MEMS行业最受追捧的产品之一。硅MEMS麦克风的发展看似简单,但却有许多内在隐藏的问题和挑战需要克服和解决。将分享失败和成功发展的教训和经验。展望其应用路线图的未来前景。在快节奏的手机和智能设备的驱动下,硅MEMS麦克风可能很快就会遇到技术边界和限制。本讲座将讨论维持增长的潜在破坏性解决方案。
After having been long incubated originally for miniature hearing aid application, silicon condenser microphone found its adoption in mobile phone applications 12 years ago and has since then explosively grown to one of the most pursued products in the MEMS industry. Development of silicon MEMS microphone looks simple but has many intrinsically hidden issues and challenges to overcome and solve. Lessons and experience from both failed and successful developments will be shared. Future outlook of its application roadmap will be envisioned. As being driven by fast paced mobile phones and smart devices, silicon MEMS microphone may soon encounter its technical boundary and restraints. Potential disruptive solutions for sustaining growth will be discussed in this talk.