The era of silicon MEMS microphone and look beyond
The era of silicon MEMS microphone and look beyond
复制标题
硅MEMS麦克风时代及其展望
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
J. Tao
中科院分区:
文献类型:
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作者:
Zhe Wang;Q. Zou;Qinglin Song;J. Tao
After having been long incubated originally for miniature hearing aid application, silicon condenser microphone found its adoption in mobile phone applications 12 years ago and has since then explosively grown to one of the most pursued products in the MEMS industry. Development of silicon MEMS microphone looks simple but has many intrinsically hidden issues and challenges to overcome and solve. Lessons and experience from both failed and successful developments will be shared. Future outlook of its application roadmap will be envisioned. As being driven by fast paced mobile phones and smart devices, silicon MEMS microphone may soon encounter its technical boundary and restraints. Potential disruptive solutions for sustaining growth will be discussed in this talk.