Micropolarizer array for infrared imaging polarimetry
Micropolarizer array for infrared imaging polarimetry
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DOI：
10.1364/josaa.16.001168
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发表时间：
1999-05-01
影响因子：
1.9
通讯作者：
Jones, MW
中科院分区：
文献类型：
--
作者：
Nordin, GP;Meier, JT;Jones, MW
本文介绍了一种用于3-5 μ m波段偏振成像的微偏振器阵列的设计和制作。每个微偏振器由475 nm周期的Mo线栅组成，孔径为16 μ m × 16 μ m。干涉光刻用于通过蚀刻掩模层产生小光栅特征。在三个不同的角度取向的256 × 256微偏振器的阵列已经制造，允许在成像偏振计的每个像素中的前三个斯托克斯矢量分量的测量。一个成像系统组成的微偏振器阵列直接集成到焦平面阵列已组装，并进行了初步测试。(C)1999年美国光学学会[S 0740 -3232（99）01905-5]。
The design and fabrication of a micropolarizer array for imaging polarimetry is described for the 3-5-mu m-wavelength region. Each micropolarizer consists of a 475-nm-period Mo wire grid in a 16 mu m x 16 mu m aperture. Interference lithography is used to generate the small grating features through an etch mask layer. Arrays of 256 x 256 micropolarizers at three distinct angular orientations have been fabricated that permit the measurement of the first three Stokes vector components in each pixel of an imaging polarimeter. An imaging system composed of a micropolarizer array integrated directly onto a focal plane array has been assembled, and initial testing has been performed. (C) 1999 Optical Society of America [S0740-3232(99)01905-5].