Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures
Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures
复制标题
用于制造周期性三维分层纳米结构的多重图案纳米球光刻
DOI：
10.1021/acsnano.7b05472
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发表时间：
2017
期刊：
影响因子：
17.1
通讯作者：
Weiss, Paul S.
中科院分区：
文献类型：
--
作者：
Xu, Xiaobin;Yang, Qing;Wattanatorn, Natcha;Zhao, Chuanzhen;Chiang, Naihao;Jonas, Steven J.;Weiss, Paul S.
虽然三维（3D）可配置的分级纳米结构在电子学、生物学和光学中具有广泛的应用，但找到可扩展的方法仍然是一个挑战。我们报告了一个强大的和一般的战略，称为多重图案化纳米球光刻（MP-NSL）的周期性的3D层次纳米结构的制造在一个高度可扩展和可调的方式。这种纳米纤维技术利用了聚合物纳米球的选择和重复蚀刻，这些聚合物纳米球用作抗蚀剂，并且可以在每个处理步骤中并行成形。MP-NSL的应用使周期性的，垂直排列的硅纳米管的制造在晶圆级与纳米级控制在三个维度，包括外/内直径，高度/孔深度，和间距。MP-NSL方法被用来构建3D周期性分层混合纳米结构，如多层固体/中空纳米塔，其中每个结构的每个级别的高度和直径可以精确地配置，以及3D同心等离子体纳米盘/纳米环，其在各种衬底上具有可调的光学性质。
While three-dimensional (3D) configurable hierarchical nanostructures have wide ranging applications in electronics, biology, and optics, finding scalable approaches remains a challenge. We report a robust and general strategy called multiple-patterning nanosphere lithography (MP-NSL) for the fabrication of periodic 3D hierarchical nanostructures in a highly scalable and tunable manner. This nanofabrication technique exploits the selected and repeated etching of polymer nanospheres that serve as resists and that can be shaped in parallel for each processing step. The application of MP-NSL enables the fabrication of periodic, vertically aligned Si nanotubes at the wafer scale with nanometer-scale control in three dimensions including outer/inner diameters, heights/hole-depths, and pitches. The MP-NSL method was utilized to construct 3D periodic hierarchical hybrid nanostructures such as multilevel solid/hollow nanotowers where the height and diameter of each level of each structure can be configured precisely as well as 3D concentric plasmonic nanodisk/nanorings with tunable optical properties on a variety of substrates.