Fabrication of Π-structured Bi-Te thermoelectric micro-device by electrodeposition
Fabrication of Π-structured Bi-Te thermoelectric micro-device by electrodeposition
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DOI：
10.1016/j.electacta.2014.12.019
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发表时间：
2015-01
影响因子：
6.6
通讯作者：
K. Uda;Yuta Seki;M. Saito;Y. Sonobe;Yu-Chin Hsieh;Hidefumi Takahashi;I. Terasaki;T. Homma
中科院分区：
文献类型：
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作者：
K. Uda;Yuta Seki;M. Saito;Y. Sonobe;Yu-Chin Hsieh;Hidefumi Takahashi;I. Terasaki;T. Homma
一种具有大的上电极的双晶结构Bi-Te微型热电器件，即，通过电沉积制造伞形装置，并评价电极尺寸的影响。在硝酸水溶液中电沉积制备了Bi-Te热电材料。该器件由8个阵列组成，每个阵列由110个热电单元组成，每个热电单元电沉积在具有20 μm深的50 × 50 μ m2孔阵列的图案化基底上。对n型和p型Bi-Te薄膜的沉积条件进行了优化，以使材料的图案化电沉积产生致密和均匀的沉积物。因此，材料被选择性地沉积在图案中以制造热电微型器件。由此产生的伞形装置，其电极比较小电极大1.65倍，产生的功率比具有较小电极的装置多4.57倍。因此，我们通过使用伞型装置确认了改善功效。
A Π-structured Bi-Te micro-thermoelectric device with a large upper electrode, i.e., an umbrella-type device, was fabricated via electrodeposition, and the effect of the size of the electrode was evaluated. The Bi-Te thermoelectric materials were electrodeposited from HNO3-based aqueous electrolyte. The device consisted of eight arrays, each consisting of 110 thermoelectric units, each of which was electrodeposited onto the patterned substrate with an array of 50 × 50 μm2holes that were 20 μm deep. The deposition conditions for the n-type and p-type Bi-Te films were optimized to enable patterned electrodeposition of the materials to yield dense and uniform deposits. Accordingly, the materials were selectively deposited in a pattern to fabricate the thermoelectric micro-device. The resultant umbrella-type device, whose electrode is 1.65 times larger than smaller electrode, generated 4.57 times more power than the device with a smaller electrode. Therefore, we confirmed the improvement power by using an umbrella-type device.