Preparation and characterization of sol-gel derived (100)-textured Pb(Zr,Ti)O3 thin films:: PbO seeding role in the formation of preferential orientation
Preparation and characterization of sol-gel derived (100)-textured Pb(Zr,Ti)O3 thin films:: PbO seeding role in the formation of preferential orientation
复制标题
DOI：
10.1016/j.actamat.2004.02.025
复制
发表时间：
2004-05-17
期刊：
影响因子：
9.4
通讯作者：
Li, LT
中科院分区：
文献类型：
--
作者：
Gong, W;Li, JF;Li, LT
使用溶胶-凝胶法将成分接近同形相边界区域的锆钛酸铅（PZT）薄膜沉积到Pt（1 1 1）/Ti/SiO2/Si（1 0 0）基板上。在 PZT 薄膜的最下面表面和铂电极表面之间引入籽晶层以控制 PZT 薄膜的织构。氧化铅籽晶层导致形成单相钙钛矿和绝对 (1 0 0) 织构的 PZT 薄膜。使用 SEM、XRD、XPS 和 AES 来表征氧化铅层和 PZT 薄膜的演变。从现象学角度提出了(1 0 0)织构PZT薄膜的生长动力学机制。还评估并讨论了与不同择优取向相关的 PZT 薄膜的铁电和压电性能。 (C) 2004 Acta Materialia Inc. 由 Elsevier Ltd 出版。保留所有权利。
Lead zirconate titanate (PZT) thin films with a composition near the morphotropic phase boundary region were deposited onto Pt(1 1 1)/Ti/SiO2/Si(1 0 0) substrates using a sol-gel method. A seeding layer was introduced between the most underlying surface of the PZT film and the platinum electrode surface to control the texture of the PZT thin film. The lead oxide seeding layer resulted in the formation of a single-phase perovskite and absolutely (1 0 0)-textured PZT film. SEM, XRD, XPS, and AES were used to characterize the evolution of the lead oxide layer and the PZT thin films. The growth kinetic mechanism of the (1 0 0)-textured PZT thin films was proposed phenomenologically. The ferroelectric and piezoelectric properties of the PZT films were also evaluated and discussed in association with different preferential orientations. (C) 2004 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.