Suspended Single-Crystal Diamond Nanowires for High-Performance Nanoelectromechanical Switches
Suspended Single-Crystal Diamond Nanowires for High-Performance Nanoelectromechanical Switches
复制标题
DOI：
10.1002/adma.201003074
复制
发表时间：
2010-12-14
影响因子：
29.4
通讯作者：
Koide, Yasuo
中科院分区：
文献类型：
--
作者：
Liao, Meiyong;Hishita, Shunichi;Koide, Yasuo
单晶金刚石纳米线的尺寸控制良好，批量制造的纳米机电系统（NEMS）。全单晶金刚石NEM开关，证明使用这些纳米线具有高再现性，高可控性，重复开关，和无静摩擦。金刚石开关不仅克服了现有机电开关中的摩擦和磨损问题，而且还避免了浅掺杂问题。
Single-crystal diamond nanowires with well-controlled dimensions are fabricated in batches for nanoelectromechanical systems (NEMS). All-single-crystal diamond NEM switches are demonstrated using these nanowires with high reproducibility, high controllability, repeated switching, and no stiction. Diamond switches not only overcome the stiction and abrasion problems in existing electromechanical switches, but also circumvent the shallow doping problem.