Material Impact on Diamond Machining of Diffractive Optical Structures for UV-Application
Material Impact on Diamond Machining of Diffractive Optical Structures for UV-Application
复制标题
DOI：
10.3390/jmmp2010015
复制
发表时间：
2018-03
期刊：
影响因子：
--
通讯作者：
A. Holthusen;O. Riemer;E. Brinksmeier
中科院分区：
文献类型：
--
作者：
A. Holthusen;O. Riemer;E. Brinksmeier
本文讨论了衍射光学元件 (DOE) 加工的金刚石车削工艺中不同加工参数对结构质量的影响。特别关注材料对几何结构质量的影响。首先，描述 DOE 的加工过程。结构化工艺基于端面车削工艺与纳米快刀伺服 (nFTS) 相结合，可在最大频率 5 kHz 的情况下在高达 1 μm 的范围内改变切削深度。所使用的金刚石工具具有定制的矩形工具几何形状，工具宽度为 10–20 μm。为了确定材料影响和几个加工参数的影响，对不同的结构进行了加工，并分析了它们的几何和形貌质量。
This paper discusses the impact of different machining parameters on structuring quality in a diamond turning process for the machining of diffractive optical elements (DOEs). Special attention is paid to the impact of the material on the geometric structuring quality. First, the machining process for DOEs is described. The structuring process is based on a face turning process combined with a nano Fast Tool Servo (nFTS), which varies the depth of cuts within a range of up to 1 μm at a maximum frequency of 5 kHz. The diamond tools being used exhibit customized rectangular tool geometry with a tool width of 10–20 μm. To determine the material impact and the influence of several machining parameters, different structures have been machined, and their geometric and topographic quality has been analyzed.