Microchannel-based refractive index sensors monolithically integrated with silica waveguides: Structures and sensitivities
Microchannel-based refractive index sensors monolithically integrated with silica waveguides: Structures and sensitivities
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DOI：
10.1109/jsen.2008.918204
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发表时间：
2008-05-01
影响因子：
4.3
通讯作者：
Ledderhof, Christopher J.
中科院分区：
文献类型：
--
作者：
Dumais, Patrick;Callender, Claire L.;Ledderhof, Christopher J.
介绍了一种利用自形成微通道嵌入硼磷硅玻璃并与石英波导单片集成的折射率传感器。制作的器件包括实芯和液芯定向耦合器，液芯模态干涉仪，马赫-曾德尔干涉仪，分段波导，和微通道光栅器件。这些设备的灵敏度计算和相互比较，并与其他知名的设备。实验结果表明，所制备的器件的性能与计算结果吻合良好。
Refractive index sensors using self-forming microchannels embedded in borophosphosilicate glass and monolithically integrated with silica waveguides are presented. Fabricated devices presented include solid-core and liquid-core directional couplers, liquid-core modal interferometers, Mach-Zehnder interferometers, segmented waveguides, and microchannel grating devices. Sensitivities of these devices are calculated and compared with each other and to other well-known devices. Experimental characterizations show that the performance of fabricated devices agrees well with calculations.