A toroidal power inductor using radial-anisotropy thin-film magnetic material based on a hybrid fabrication process
A toroidal power inductor using radial-anisotropy thin-film magnetic material based on a hybrid fabrication process
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基于混合制造工艺的采用径向各向异性薄膜磁性材料的环形功率电感器
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发表时间：
2013
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通讯作者：
C. Sullivan
中科院分区：
文献类型：
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作者：
J. Qiu;D. Harburg;C. Sullivan
本文提出了使用和不使用径向各向异性薄膜磁性材料的高频环形功率电感器的设计和制造的改进。考虑到实际绕组形状的角度因子、匝间距的影响以及与圆周方向上的外部电流相关的损耗，开发了一种改进的环形线圈绕组电阻模型。提出了一种制造薄型磁芯环形线圈的混合工艺。该工艺对顶部和底部绕组层采用标准柔性印刷电路板 (PCB) 技术，并在将磁芯夹在两个绕组层之间后电镀通孔。薄膜磁性材料 (Co-Zr-O) 在径向磁场存在下沉积，从而在环形磁芯中产生径向各向异性。小信号测量表明，环形磁芯在高达数百兆赫兹的频率下具有超过 40 的相对磁导率，并且在低于 100 MHz 的频率范围内具有非常高的品质因数。使用这种混合制造工艺的空芯和磁芯环形电感器是在小信号电平下构建和测试的。在频率低于 100 MHz 时，磁芯环形线圈比空芯环形线圈表现出更高的电感和品质因数。该绕组损耗模型和制造工艺可应用于空芯和磁芯环形电感器。
This paper presents improvements for the design and fabrication of high-frequency toroidal power inductors with and without radial-anisotropy thin-film magnetic material. An improved winding resistance model for toroids is developed considering an angle factor for actual winding shape, the effect of spacing between turns and loss associated with exterior current in the circumferential direction. A hybrid process for fabricating low-profile magnetic-core toroids is presented. The process uses standard flex printed circuit board (PCB) technology for the top and bottom winding layers with vias electroplated after sandwiching the magnetic core between the two winding layers. Thin-film magnetic material (Co-Zr-O) is deposited in the presence of a radial magnetic field, which induces radial anisotropy in the toroidal core. Small-signal measurements show that the toroidal core has a relative permeability over 40 at frequencies up to several hundred megahertz, and very high quality factor in the frequency range below 100 MHz. Air-core and magnetic-core toroidal inductors using this hybrid fabrication process were built and tested at small-signal levels. Magnetic-core toroids showed a higher inductance and quality factor than air-core toroids at frequencies below 100 MHz. This winding loss model and fabrication process can be applied to both air-core and magnetic-core toroidal inductors.