SHF-range surface acoustic wave interdigital transducers using electron beam exposure
SHF-range surface acoustic wave interdigital transducers using electron beam exposure
复制标题
使用电子束曝光的 SHF 系列表面声波叉指换能器
DOI：
10.1109/ultsym.1988.49352
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发表时间：
1988
期刊：
影响因子：
--
通讯作者：
T. Meguro
中科院分区：
文献类型：
--
作者：
K. Yamanouchi;Y. Cho;T. Meguro
使用直接电子束光刻、正常剥离技术和 I/sub 2/-等离子体清洁系统制造了 0.085μm 宽度的纳米电极。这些技术已应用于用作 SHF 范围内的表面声波 (SAW) 换能器的叉指换能器。 SAW 滤波器实验是在 SHF 范围内进行的。获得了在中心频率 5 GHz 处插入损耗最小为 15.0 dB、在 11 GHz 处插入损耗最小为 24 dB 的滤波器。<<ETX>>
Nanometer electrodes of 0.085- mu m width have been fabricated using direct electron beam lithography, normal lift-off techniques, and an I/sub 2/-plasma cleaning system. These techniques have been applied to interdigital transducers used as surface acoustic wave (SAW) transducers in the SHF range. SAW filters experiments were performed in the SHF-range. Filters with minimum insertion loss of 15.0 dB at the center frequency of 5 GHz and 24 dB at 11 GHz were obtained.<<ETX>>