A micro electromagnetic actuator with high force density
A micro electromagnetic actuator with high force density
复制标题
一种高力密度微型电磁执行器
DOI：
10.1016/j.sna.2021.112771
复制
发表时间：
2021-06-30
影响因子：
4.6
通讯作者：
Wang, Xi
中科院分区：
文献类型：
--
作者：
Wang, Yue;Zhi, Chao;Wang, Xi
本文提出了一种具有高力密度的平面型微电磁驱动器。驱动器由动子（8 mm*8 mm*0.5 mm）和定子（14 mm * 10 mm *0.2 mm）组成。作为动子，具有棋盘图案（单元尺寸为0.8mm * 0.8mm）的厚NdFeB永磁体膜（300 μ m）与铁磁背轭连接以提供增强的磁通密度。在定子中，设计了多匝结构的三维网状微线圈。微线圈在相邻网格单元之间具有新颖的连接，这使得容易制造。棋盘形厚膜磁体和多匝连接方式新颖的微线圈构成了该驱动器的独创性。动子和定子可以通过批量制造来生产。模拟和实验测量了磁体产生的磁通密度（B）。垂直方向上的B震级在距地表770 μ m的平面上达到40 m T左右。由于设计精巧，MEMS微线圈可以承受高达0.4A的恒定电流输入超过60分钟的热绝缘陶瓷板。长时间的实验验证了该微驱动器的实用性。通过改变定子中的电流方向，可以在动子上产生排斥和吸引的电磁力。在20 μ m间隙下，定子电流为0.1A时，测得的力约为4.3mN，力密度高达0.96mN/A/mm（3）。(C)2021爱思唯尔有限公司版权所有。
In this paper, we propose a planar type micro electromagnetic actuator with high force density. The actuator is composed of a mover (8 mm*8 mm*0.5 mm) and a stator (14mm*10mm*0.2 mm). As the mover, a thick NdFeB permanent magnet film (300 mu m) with a chessboard pattern (unit size is 0.8 mm*0.8 mm) is attached with a ferromagnetic back yoke to provide enhanced magnetic flux density. In the stator, 3D mesh type micro coil with multi-turn configuration is designed accordingly. The micro coil has a novel connection between adjacent mesh units, which enables easy fabrication. The thick film magnet with chessboard pattern as well as the multi-turn micro coil with novel connection constitute the originality of this actuator. The mover and the stator can be produced by batch fabrication. The magnetic flux density (B) generated by the magnet are simulated and experimentally measured. The magnitude of B at vertical direction attains around 40 m T at 770 mu m plane above the surface. Due to delicate design, the MEMS-based micro coil can withstand as high as 0.4A constant current input for over 60 min on a thermal isolated ceramic plate. The long-time duration experiment testifies the practicality of this micro actuator. Both repulsive and attractive electromagnetic force can be generated on the mover by altering the current direction in the stator. The measured force is around 4.3 mN at 20 mu m gap with 0.1A stable current input in the stator and the force density attains as high as 0.96 mN/A/mm(3). (C) 2021 Elsevier B.V. All rights reserved.