Dynamics and pull-in instability of electrostatically actuated microbeams conveying fluid
Dynamics and pull-in instability of electrostatically actuated microbeams conveying fluid
复制标题
静电驱动微梁输送流体的动力学和牵引不稳定性
DOI：
10.1007/s10404-014-1407-x
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发表时间：
2015
影响因子：
2.8
通讯作者：
Ni, Q.
中科院分区：
文献类型：
--
作者：
Dai, H. L.;Wang, L.;Ni, Q.
本文的目的是建立一个理论模型来预测含有内部流体流动的静电驱动微梁的动力学和拉入机制。考虑了流动速度的非均匀分布、微光束的材料长度尺度参数和非线性静电力的影响，建立了微光束的运动方程。微梁的侧向位移包括静（定）动位移和关于静力的摄动位移两部分。基于一般微分求积分规则，对微梁的静挠度进行了数值计算。然后用得到的静挠度来求解控制扰动位移的方程。分析了夹固边界条件和悬臂边界条件下微梁的固有频率和流致失稳特性。结果表明，内部流体流动会显著影响微梁的静态偏转，从而影响拉入电压。另一方面，电压会显著影响微束的动力学。
The purpose of this paper is to develop a theoretical model for predicting the dynamics and pull-in mechanism of electrostatically actuated microbeams containing internal fluid flow. By considering the effects of nonuniform profile of the flow velocity, material length scale parameter of the microbeam and nonlinear electrostatical force, the equation of motion of the microbeam has been presented. The lateral displacement of the microbeam consists of two parts: a static (steady) displacement and a perturbation displacement about the static. Based on the general differential quadrature rule, the static deflection of the microbeam is calculated numerically. The obtained static deflection is then used to solve the equation governing the perturbed displacement. The natural frequency and flow-induced instability of the microbeam are analyzed for both clamped–clamped and cantilevered boundary conditions. Results show that the internal fluid flow could dramatically affect the static deflection of the microbeam and hence the pull-in voltage. The electric voltage, on the other hand, would significantly influence the dynamics of the microbeam.
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影响因子：
3.6
作者：
Wang, L.
通讯作者：
Wang, L.
影响因子：
2.3
作者：
Laura Ruzziconi;A. Bataineh;M. Younis;W. Cui;S. Lenci
通讯作者：
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DOI：
10.1016/j.ijengsci.2013.06.006
发表时间：
2013-10-01
影响因子：
6.6
作者：
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通讯作者：
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影响因子：
6.6
作者：
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通讯作者：
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影响因子：
2.3
作者：
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通讯作者：
Bumkyoo Choi;E. Lovell