Superior Temperature-Sensing Performance in Cladding-Modulated Si Waveguide Gratings
Superior Temperature-Sensing Performance in Cladding-Modulated Si Waveguide Gratings
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DOI：
10.1109/jlt.2016.2601114
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发表时间：
2016-09
影响因子：
4.7
通讯作者：
Y. Hung;Chong-Jia Wu;Tse-Hung Chen;T. Yen;Ya-Ching Liang
中科院分区：
文献类型：
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作者：
Y. Hung;Chong-Jia Wu;Tse-Hung Chen;T. Yen;Ya-Ching Liang
本文提出了一种基于互补金属氧化物半导体（CMOS）兼容包层调制（CladMod）光栅设计的硅光子温度传感器的绝缘体上硅平台上。所得到的器件实现了窄带反射（Δλ = 0.63 nm）、高消光比（21 dB）、高温度灵敏度（83.4 pm/°C）和宽温度传感范围。更重要的是，这种光栅设计允许稳定的反射带宽（Δλ/ΔWg = 0.013）、布拉格波长（λB/ΔWg = 0.002）和对光栅宽度变化的温度灵敏度（δλ /δT/ΔWg = -1.3 × 10-5 K-1）。这种水平的温度感测性能是难以实现的使用带/板型光栅或microwave谐振器。CladMod光栅还在标准体CMOS工艺中在多晶硅栅极上实现，从而能够与其他微电子器件集成，以用作片上分布式温度传感元件。这种方法显示出相当大的应用前景，例如需要原位温度监测以实现波长稳定的未来光电集成电路，或高温微电子器件，其中硅带隙温度传感器不能正常工作。
This paper presents a silicon photonic temperature sensor based on a complementary metal-oxide-semiconductor (CMOS) compatible cladding-modulated (CladMod) grating design on the silicon-on-insulator platform. The resulting device achieves narrow-band reflection (Δλ = 0.63 nm), a high extinction ratio (21 dB), high temperature sensitivity (83.4 pm/°C), and a wide temperature-sensing range. More importantly, this grating design allows stable reflection bandwidth (Δλ/ΔWg = 0.013), Bragg wavelength (λB/ΔWg = 0.002), and temperature sensitivity (δλ /δT/ΔWg = -1.3 × 10-5 K-1) against variations in grating width. This level of temperature-sensing performance is difficult to achieve using a strip/slab-type grating or microring resonator. The CladMod gratings were further implemented on a polysilicon gate in a standard bulk CMOS process, thereby enabling integration with other microelectronic devices to serve as an on-chip distributed temperature-sensing element This approach shows considerable promise for applications such as future photonic-electronic integrated circuits requiring in situ temperature monitoring for wavelength stabilization, or high-temperature microelectronics where silicon bandgap temperature sensors are unable to operate properly.