Digital wavefront measuring interferometer for testing optical surfaces and lenses
Digital wavefront measuring interferometer for testing optical surfaces and lenses
复制标题
DOI：
10.1117/12.132168
复制
发表时间：
1992-10
期刊：
影响因子：
--
通讯作者：
T. Cao
中科院分区：
文献类型：
--
作者：
T. Cao
本文介绍了我国第一台用于科研的SPG-1型数字波前干涉仪。本文介绍了我院1985年研制成功的数字干涉仪和另外两种新研制的用于车间检测的数字干涉仪（SPG-Ⅱ型和CQG-Ⅰ型）。这些仪器基于傅立叶相位干涉测量技术。它将激光技术、干涉测量技术和微机技术相结合，是目前最精确、最强大、最高效的干涉测量仪器。主要用于光学面形（平面、非球面、棱镜面）、透明材料均匀性、光栅质量的检测。当使用适当的附加附件时，它也可以用于非球面和各种透镜的质量评估。用IBM-PC/XT微型计算机进行数据采集和数据处理。相位分辨率为λ/1000（λ = 632.8nm），面形精度为λ/40。该仪器能实时显示三维图像、等值线图、PV值、RMS值、PTS值，并能打印所有条纹数据。由于软件包功能强大，操作简单。简单的光学系统使这种仪器的成本较低。
In this paper a description of the first SPG-1 model digital wavefront interferometer for scientific research in P.R. China, designed and made in our university in 1985, and two other new models of digital interferometer (SPG-II and CQG-I model) designed and produced for shop testing are described. These instruments are based on a technique with Fourier phase interferometry. The combination of laser technique with interferometry and microcomputer techniques makes it the most accurate, powerful, and efficient interferometric instrument at present. It is mainly used for measuring of figure of optical surfaces (flat, aspheric surfaces and prism surfaces), uniformity of transparent materials, and quality of gratings. When proper additional accessories are used it can also be used for quality appreciation of aspherical surfaces and various kinds of lenses. A microcomputer (IBM-PC/XT) is used for data sampling and data processing. Phase resolution of (lambda) /1000 ((lambda) equals 632.8 nm) and accuracy of surface figure (lambda) /40 are obtained. The instrument can show real-time 3-D display, contour map, and the values of PV, RMS, and PTS, and typewrite all the fringe data. Owing to the powerful software package, it is easy to operate. The simple optical system keeps the cost of this instrument lower.