MEMS Ultrasonic Fingertip Heart Rate Sensor
MEMS Ultrasonic Fingertip Heart Rate Sensor
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DOI：
10.1109/jsen.2022.3207355
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发表时间：
2022-11
影响因子：
4.3
通讯作者：
Sheng Sun;Menglun Zhang;Chuanhai Gao;Yi Gong;Jianyuan Wang;Yuan Ning;Qingrui Yang;W. Pang
中科院分区：
文献类型：
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作者：
Sheng Sun;Menglun Zhang;Chuanhai Gao;Yi Gong;Jianyuan Wang;Yuan Ning;Qingrui Yang;W. Pang
心跳是人类主要的生理活动之一，与心理和生理状态密切相关。由于有限的解决方案存在方便的心率测量在指尖，如光电容积脉搏波，本文提供了一种替代解决方案，使压电微机械超声换能器（PMUT）。在指尖血管扩张和收缩的情况下，PMUT和指骨之间的超声飞行时间（TOF）的变化用于提取心率数据。一个PMUT的谐振频率为4.3 MHz的设计和制造为25 × 25阵列的元素，和聚对二甲苯和聚二甲基硅氧烷（PDMS）用于封装和更好地耦合指尖，分别。发射超声波的空间峰值时间平均功率密度为36 nW/mm 2，远低于美国食品药品监督管理局（FDA）的安全限值。该解决方案为基于超声的指尖心率监测铺平了道路，具有使用方便，易于集成和生物安全的特点。
The heartbeat is one of the main human physiological activities and is closely related to psychological and physiological states. Since limited solutions exist for convenient heart rate measurements at the fingertip, such as photoplethysmography, this article provides an alternative solution enabled by a piezoelectric micromachined ultrasonic transducer (PMUT). With fingertip vascular expansion and retraction, the change in ultrasound time-of-flight (TOF) between the PMUT and phalanx is used to extract heart rate data. A PMUT with a resonant frequency of 4.3 MHz is designed and fabricated as a 25 by 25 array of elements, and Parylene and polydimethylsiloxane (PDMS) are used for packaging and better coupling with fingertips, respectively. The emitting ultrasound has a spatial-peak temporal average power density of 36 nW/mm2, far below the Food and Drug Administration (FDA) safety limit. The proposed solution paves the way for ultrasound-based heart rate monitoring at the fingertip, and it features convenient to use, easy integration, and biosafety.