Improved Femtosecond 3D Light Field Lithography With a Phase-Controlled Spatial Light Modulator
Improved Femtosecond 3D Light Field Lithography With a Phase-Controlled Spatial Light Modulator
复制标题
使用相控空间光调制器改进飞秒 3D 光场光刻
DOI:
10.1115/ht2022-85681
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发表时间:
2022
期刊:
影响因子:
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通讯作者:
Wen, Sy-Bor
中科院分区:
文献类型:
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作者:
Jakkinapalli, Aravind;Wen, Sy-Bor