Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen
Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen
复制标题
提高无氧钯/钛非蒸发吸气剂涂层的抽气速度并通过在氧气下烘烤抑制脱气
DOI：
10.1116/1.5074160
复制
发表时间：
2019
影响因子：
2.9
通讯作者：
Mase Kazuhiko
中科院分区：
文献类型：
--
作者：
Miyazawa Tetsuya;Kano Yu;Nakayama Yasuo;Ozawa Kenichi;Iga Toshiharu;Yamanaka Misao;Hashimoto Ayako;Kikuchi Takashi;Mase Kazuhiko
