Graphoepitaxy of spherical domain block copolymer films

Graphoepitaxy of spherical domain block copolymer films
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DOI:
10.1002/1521-4095(200108)13:15
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发表时间:
2001-08-03
期刊:
影响因子:
29.4
通讯作者:
Kramer, EJ
Kramer, EJ
中科院分区:
材料科学1区
文献类型:
--
作者:
Segalman, RA;Yokoyama, H;Kramer, EJ

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如果下面的表面已经被蚀刻以形成威尔斯和台面,则球形嵌段共聚物膜的长程有序性大大改善。聚苯乙烯/聚(2-乙烯基吡啶)嵌段共聚物在具有1-10 μ m宽的结构的po SiO2上的外延生长在台面的顶部产生单晶状结构(见图),并且在威尔斯中,如果台面的高度超过一层共聚物球(27 nm)。(See也在封面内)。
The long-range order of spherical block copolymer films is greatly improved if the underlying surface has been etched to form wells and mesas. Epitaxial growth of polystyrene/poly (2-vinylpyridine) block copolymers on po SiO2 with structures 1-10 mum wide yields single-crystal-like structures on top of the mesas (see Figure), and in the wells, provided the height of the mesas exceeds one layer of copolymer spheres (27 nm). (See also inside front cover.).