Z.G.Li, M.Mori, S.Miyake, M.Kumagai, T.Saito, Y.Muramatsu: "Structure and Properties of TiSiN Films Prepared by ICP Assisted Magnetron Sputtering with Low Energy Ion Bombatdment"The 4^<th> Asia-European International Conference on Plasma Surface Engineeri
Z.G.Li, M.Mori, S.Miyake, M.Kumagai, T.Saito, Y.Muramatsu: "Structure and Properties of TiSiN Films Prepared by ICP Assisted Magnetron Sputtering with Low Energy Ion Bombatdment"The 4^<th> Asia-European International Conference on Plasma Surface Engineeri
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Z.G.Li、M.Mori、S.Miyake、M.Kumagai、T.Saito、Y.Muramatsu：“ICP辅助磁控溅射低能离子轰击制备TiSiN薄膜的结构和性能”第4届亚洲-
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