A review of nanoindentation continuous stiffness measurement technique and its applications
A review of nanoindentation continuous stiffness measurement technique and its applications
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DOI：
10.1016/s1044-5803(02)00192-4
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发表时间：
2002-02-01
影响因子：
4.7
通讯作者：
Bhushan, B
中科院分区：
文献类型：
--
作者：
Li, XD;Bhushan, B
纳米压痕法是目前研究纳米尺度材料力学性能的常用方法。纳米压痕测试的一个重要改进是连续刚度测量（CSM）技术。它提供了一个直接测量的动态接触刚度在加载部分的压痕试验，有点不敏感的热漂移，允许小体积变形的准确观察。由疲劳引起的纳米级损伤对于抗腐蚀保护涂层和微米/纳米结构的可靠性至关重要。CSM中使用的循环载荷使得该技术可用于纳米疲劳的评估。CSM技术用于表征层状材料和非均匀复合材料的方法进行了审查和讨论。介绍了CSM技术在磁存储器件材料的接触刚度、弹性模量、硬度、抗蠕变性和疲劳性能测量中的应用。纳米压痕CSM技术，结合纳米划痕和摩擦磨损试验，可以令人满意地用于磁存储和微机电系统（MEMS）器件的材料表征，并应找到更多的应用。(C)2002年爱思唯尔科技有限公司All rights reserved.
Nanoindentation is now commonly used for the study of mechanical properties of materials on the nanoscale. One of the significant improvements in nanoindentation testing is the continuous stiffness measurement (CSM) technique. It offers a direct measure of dynamic contact stiffness during the loading portion of an indentation test and, being somewhat insensitive to thermal drift, allows an accurate observation of small volume deformation. Nanoscale damage caused by fatigue is of critical importance to the reliability of ultrathin protective overcoats and micro/nanostructures. The cyclic loading used in the CSM makes the technique useful for the evaluation of nanofatigue. Methodologies of the CSM technique used for the characterization of layered materials and nonhomogeneous composites are reviewed and discussed. Applications of the CSM technique to the measurement of contact stiffness, elastic modulus, hardness, creep resistance, and fatigue properties of the materials used in magnetic storage devices are presented. The nanoindentation CSM technique, in conjunction with nanoscratch and friction and wear tests, can be satisfactorily used for the materials characterization of magnetic storage and microelectromechanical systems (MEMS) devices and should find more application. (C) 2002 Elsevier Science Inc. All rights reserved.