Nanopatterning of catalyst by Dip Pen nanolithography (DPN) for synthesis of carbon nanotubes (CNT).
Nanopatterning of catalyst by Dip Pen nanolithography (DPN) for synthesis of carbon nanotubes (CNT).
复制标题
通过浸笔纳米光刻 (DPN) 对催化剂进行纳米图案化，用于合成碳纳米管 (CNT)。
作者：
S.;D. Banerjee;A. B. Kaul;K. Megerian
在纳米图案化催化剂上合成了碳纳米管。采用浸渍笔纳米光刻技术制备了催化剂纳米粒子。采用浸笔纳米光刻技术在硅衬底上制备了特征尺寸小于200 nm的存款NiCl（2）纳米片。沉积的功能进行了验证，通过使用横向力显微镜。然后将衬底放置在等离子体增强化学气相沉积仪器中以合成CNT。合成的碳纳米管，其特征在于使用扫描电子显微镜和能量色散X射线光谱。
Carbon nanotubes (CNT) were synthesized on nanopatterned catalysts. The catalyst nanoparticles were obtained using dip pen nanolithographytechnique. Dip pen nanolithography technique was used to deposit NiCl(2) nanopatterns with sub-200 nm feature sizes on a silicon substrate. The deposited features were verified by using lateral force microscopy. The substrate was then placed in a plasma-enhanced chemical vapor deposition instrument to synthesize CNT. The synthesized CNT were characterized using scanning electron microscopy and energy dispersive x-ray spectroscopy.