An accurate characterization of interface-state by deep-level transient spectroscopy for Ge metal-insulator-semiconductor capacitors with SiO_2/GeO_2 bilayer passivation

An accurate characterization of interface-state by deep-level transient spectroscopy for Ge metal-insulator-semiconductor capacitors with SiO_2/GeO_2 bilayer passivation
复制标题

SiO_2/GeO_2双层钝化Ge金属-绝缘体-半导体电容器界面态的深能级瞬态光谱准确表征

DOI:
10.1063/1.4759139
复制
发表时间:
2012
影响因子:
3.2
通讯作者:
H. Nakashima
H. Nakashima
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
D. Wang;S. Kojima;K. Sakamoto;K. Yamamoto;H. Nakashima

文献摘要

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