Laser Lithography of a Tube-in-a-Tube Nanostructure.
Laser Lithography of a Tube-in-a-Tube Nanostructure.
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DOI：
10.1021/acsnano.7b00624
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发表时间：
2017-03-28
期刊：
影响因子：
17.1
通讯作者：
Wang Y
中科院分区：
文献类型：
--
作者：
Ng AL;Piao Y;Wang Y
碳纳米管在器件创新方面具有巨大的潜力，因为它们的光学和电子特性可以在光刻技术无法达到的长度尺度上进行综合定制。然而，电子控制的碳纳米管光刻图案仍然是将这些纳米材料集成到实际设备应用中的主要问题之一。在这项工作中，我们提出了一种激光光刻方法，用于在外壁选择性功能化双壁碳纳米管（Tube^2）薄膜上直接写入器件图案。该方法是通过使用与 Tube^2 内管共振的激光可逆去除表面官能团来实现的。我们证明，通过调整直写激光与内管电子类型（即金属或半导体）的谐振，可以直接在绝缘 Tube^2 薄膜上创建图案化点阵列、导电路径和电路。原位拉曼光谱成像和电特性明确证实了成功的图案化。这项工作提出了开发一种类似于热敏打印的纳米结构特定纳米加工技术的可能性。
Carbon nanotubes hold vast potential for device innovations because their optical and electronic properties can be synthetically tailored at a length scale unattainable by lithographic techniques. However, lithographic patterning of carbon nanotubes with electronic-type control remains one of the major problems for the integration of these nanomaterials for practical device applications. In this work, we propose a laser lithography method for direct-write patterning of devices on thin films of outer wall selectively functionalized double-walled carbon nanotubes (Tube^2). This method is enabled by the reversible removal of surface functional groups with a laser tuned into resonance with the inner tube of Tube^2. We show that it is possible to directly create patterned dot arrays and conductive pathways and circuits on insulating Tube^2 thin films by tuning the resonance of the direct-writing laser with the electronic type of the inner tube (i.e., metallic or semiconducting). The successful patterning was unambiguously confirmed with in situ Raman spectral imaging and electrical characterization. This work suggests the possibility of developing a nanostructure-specific nanofabrication technology reminiscent of thermal printing.
DOI：
10.1021/acs.jpcc.6b09612
发表时间：
2016-12-29
期刊：
The journal of physical chemistry. C, Nanomaterials and interfaces
影响因子：
--
作者：
Kłos J;Kim M;Alexander MH;Wang Y
通讯作者：
Wang Y