Focused ion beam preparation of samples for X-ray nanotomography
Focused ion beam preparation of samples for X-ray nanotomography
复制标题
DOI：
10.1107/s0909049512027252
复制
发表时间：
2012-09-01
影响因子：
2.5
通讯作者：
Chiu, Wilson K. S.
中科院分区：
文献类型：
--
作者：
Lombardo, Jeffrey J.;Ristau, Roger A.;Chiu, Wilson K. S.
制备具有必要尺寸和形状的硬材料样品是材料分析成功的关键。x射线纳米层析成像要求样品足够薄，以便x射线在层析成像的旋转过程中通过样品。生产符合x射线纳米层析成像标准的样品的一种方法是聚焦离子束/扫描电子显微镜（FIB/SEM），它使用聚焦离子束选择性地在感兴趣的区域周围磨铣，然后利用微操纵器从大块材料中取出磨铣的样品并将其安装在样品支架上。本文讨论了制备多种形状和尺寸的x射线纳米层析样品的工艺。此外，通过FIB/SEM技术制备的固体氧化物燃料电池阳极样品进行了体积无关性研究，如体积分数、平均粒径、弯曲度和连续度，以观察FIB/SEM样品在x射线纳米层析中的特征。
The preparation of hard material samples with the necessary size and shape is critical to successful material analysis. X-ray nanotomography requires that samples are sufficiently thin for X-rays to pass through the sample during rotation for tomography. One method for producing samples that fit the criteria for X-ray nanotomography is focused ion beam/scanning electron microscopy (FIB/SEM) which uses a focused beam of ions to selectively mill around a region of interest and then utilizes a micromanipulator to remove the milled-out sample from the bulk material and mount it on a sample holder. In this article the process for preparing X-ray nanotomography samples in multiple shapes and sizes is discussed. Additionally, solid-oxide fuel cell anode samples prepared through the FIB/SEM technique underwent volume-independence studies for multiple properties such as volume fraction, average particle size, tortuosity and contiguity to observe the characteristics of FIB/SEM samples in X-ray nanotomography.