Internal stresses and microstructures of commercial thick diamond films deposited by different deposition methods
Internal stresses and microstructures of commercial thick diamond films deposited by different deposition methods
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DOI:
10.1016/s0254-0584(01)00418-7
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发表时间:
2001-11
影响因子:
4.6
通讯作者:
C. Kuo;Jinyou Wu;C. Lin;T. Lu;C. Sung
中科院分区:
文献类型:
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作者:
C. Kuo;Jinyou Wu;C. Lin;T. Lu;C. Sung