Photo-assisted electrodeposition of sol–gel films on p-type semiconductors

Photo-assisted electrodeposition of sol–gel films on p-type semiconductors
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p型半导体上溶胶凝胶薄膜的光辅助电沉积

DOI:
10.1016/j.elecom.2015.10.002
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发表时间:
2015-12
影响因子:
5.4
通讯作者:
Hu, Ji-Ming
Hu, Ji-Ming
中科院分区:
工程技术3区
文献类型:
--
作者:
Zhou, Jin-He;Jiang, Liang-Liang;Wu, Lian-Kui;Hu, Ji-Ming

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提出了一种利用光电化学技术在半导体衬底上沉积溶胶-凝胶薄膜的新方法。这种沉积是基于在p型半导体上施加负电位和光照射时,通过电化学产生的OH−离子的催化作用加速溶胶-凝胶缩合反应。结果表明,电位负移和光强增加均有利于硅溶胶-凝胶薄膜的沉积动力学。表面图案化进一步在激光的辅助下实现。
A new approach for the deposition of sol–gel films on semiconducting substrate using photo-electrochemical technique is presented. The deposition is based on accelerating sol–gel condensation reaction by the catalyzing effect of electrochemically generated OH−ions when applying both negative potentials and light irradiation onto p-type semiconductors. Results show that both the negative shift in potential and the increase in light intensity facilitate the deposition kinetics of silica sol–gel films. Surface patterning is further achieved with the assistance of a laser.
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