Hollow Metallic Micromachined Needle Arrays
Hollow Metallic Micromachined Needle Arrays
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DOI：
10.1023/a:1009980412628
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发表时间：
2000-06-01
影响因子：
2.8
通讯作者：
Frazier, A. Bruno
中科院分区：
文献类型：
--
作者：
Brazzle, John D.;Papautsky, Ian;Frazier, A. Bruno
本文对流体耦合金属微机械针阵列进行了设计、制作、封装和表征。所述的中空金属针阵列包括诸如双结构支撑件和针耦合通道的设计特征。支撑件和针壁由微型电铸金属形成，以提供更高的结构完整性。针耦合通道用于流体互连针头，并允许针头之间的压力均衡和流体流动平衡。此外，针耦合通道通过为针道之间的流体流动提供再分配点，最大限度地减少了受限针道的影响。利用有限元数值模型对针联轴节流道进行了优化设计。这项工作的意义包括开发用于生物医学应用的中空金属微机械针阵列，以及对结构、流体和生物设计考虑因素的讨论。
In this paper, fluid coupled metallic micromachined needle arrays are designed, fabricated, packaged, and characterized. The described hollow metallic needle arrays include design features such as dual structural supports and needle coupling channels. The supports and needle walls are formed by micro-electroformed metal to provide increased structural integrity. The needle coupling channels are used to fluidically interconnect the needles and allow pressure equalization and balance of fluid flow between needles. In addition, the needle coupling channels minimize the effects of restricted needle passages by providing a redistribution point for fluid flow between them. The optimum design for the needle coupling channels is investigated using an ANSYS finite element numerical model. The significance of this work includes the development of hollow, metallic micromachined needle arrays for biomedical applications, as well as, a discussion of structural, fluidic, and biological design considerations