Fabrication of InP-PDs on Silica-Based PLC Using Heterogeneous Integration Technique
Fabrication of InP-PDs on Silica-Based PLC Using Heterogeneous Integration Technique
复制标题
使用异质集成技术在硅基 PLC 上制造 InP-PD
DOI：
10.1109/jlt.2014.2315790
复制
发表时间：
2014
影响因子：
4.7
通讯作者：
M. Itoh
中科院分区：
文献类型：
--
作者：
Y. Kurata;Y. Nasu;M. Tamura;Y. Muramoto;H. Yokoyama;M. Itoh
具有正交相移键控和数字相干技术组合的光传输系统的扩展导致了对经济和紧凑接收器的需求。在本文中，我们展示了InPPD在硅基平面光波电路(PLC)上的异质集成。利用粘结剂InP芯片键合和倾斜干法刻蚀，在PLC的小面积集成区上成功地制作了高速光电二极管和低损耗微镜。我们还对接收机的性能进行了评估。利用一个小型相干接收器PLC实现了32 Gbaud的DP-QPSK信号解调，该系统集成了8个高速PD、1个监视器PD、1个偏振分束器、2个90°光学混合器、1个可变光学衰减器和微镜。
The extension of an optical transmission system with a combination of quadrature phase-shift keying and a digital coherent technique has led to the need for economical and compact receivers. In this paper, we demonstrate the heterogeneous integration of InP PDs on a silica-based planar lightwave circuit (PLC). By utilizing adhesive InP chip bonding and tilt dry-etching, we have successfully fabricated high-speed photodiodes (PDs) and a low-loss micro-mirror on a small integration area on the PLC. We have also evaluated the receiver performance. We realized 32 Gbaud DP-QPSK signal demodulation using a compact coherent receiver PLC integrated with eight high-speed PDs, a monitor PD, a polarization beam splitter, two optical 90° hybrids, a variable optical attenuator and micro-mirrors.