Behaviors of time-dependent and time-independent adhesion forces revealed using an AFM under different humidities and measuremental protocols
Behaviors of time-dependent and time-independent adhesion forces revealed using an AFM under different humidities and measuremental protocols
复制标题
使用 AFM 在不同湿度和测量协议下揭示了时间依赖性和时间无关粘附力的行为
DOI：
10.1016/j.ijadhadh.2017.06.007
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发表时间：
2017-10-01
影响因子：
3.4
通讯作者：
Meng, Yonggang
中科院分区：
文献类型：
--
作者：
Lai, Tianmao;Meng, Yonggang
在原子力显微镜 (AFM) 上在两种相对湿度 (RH) 下测量无尖悬臂和硅晶圆之间的粘附力。实验结果表明，粘附力的行为很大程度上受相对湿度和测量协议的影响。由于水桥的平衡时间不同，毛细管对测量的粘附力的贡献在低相对湿度 (31 +/- 1%) 下与时间相关，在高相对湿度 (52 +/- 1%) 下与时间无关。与时间相关的粘附力随着接触时间呈对数增加，直到达到饱和。加载力、接近速度、回缩速度和测量次数对粘附力的影响可以通过粘附力的对数接触时间依赖性来解释。然而，与时间无关的粘附力随着停留时间而减小，并且随着回缩速度而增加。没有发现粘附力对加载力和接近速度的依赖性。在同一位置连续测量的粘附力显示出波动，且趋势不可预测。
Adhesion forces between a tipless cantilever and a silicon wafer were measured on an atomic force microscope (AFM) at two relative humidities (RH). Experimental results show that the behaviors of the adhesion force are largely influenced by the RH and measurement protocols. The capillary contribution to the measured adhesion force is time-dependent at low RH (31 +/- 1%) and time-independent at high RH (52 +/- 1%) due to different equilibrium times of water bridges. The time-dependent adhesion force increases logarithmically with contact time until saturation is reached. The effects of loading force, approach velocity, retraction velocity and measurement number on the adhesion force can be explained by the logarithmic contact time dependence of the adhesion force. However, the time-independent adhesion force decreases with dwell time, and increases with retraction velocity. No dependence of the adhesion force on loading force and approach velocity is found. The adhesion force by consecutively measurements on the same location shows fluctuations, and the trend is unpredictable.