Masanori Shinohara: "Behavior of hydride species on Si surfaces during methane plasma irradiation investigated by in-situ infrared spectroscopy"Thin Solid Films. (印刷中). (2003)
Masanori Shinohara: "Behavior of hydride species on Si surfaces during methane plasma irradiation investigated by in-situ infrared spectroscopy"Thin Solid Films. (印刷中). (2003)
复制标题
Masanori Shinohara:“通过原位红外光谱研究硅表面氢化物的行为”(正在出版)。
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: