Numerical investigation of the resolution in solid immersion lens systems
Numerical investigation of the resolution in solid immersion lens systems
复制标题
固体浸没透镜系统分辨率的数值研究
DOI：
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发表时间：
2000
期刊：
影响因子：
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通讯作者：
R. Brunner
中科院分区：
文献类型：
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作者：
J. Bischoff;R. Brunner
固体浸没显微镜是一种具有超分辨能力的光学方法，在过去的几年里受到了文献的极大关注。该技术的主要目标是光刻、图形检测(包括关键尺寸测量)和数据存储。经典理论预测分辨率增益与固体浸没透镜的折射率成正比。本文的目的是通过模拟来验证这一预测，并找到最佳的测量条件。为此，我们提出了一种非常高效、严谨的建模方法。通过这种方法，我们证明了包含逝去波对分辨率增益是至关重要的。这一点通过不同的激励和检测方案进行了详细说明。此外，我们还考察了极化和不同样本类型的影响。
Solid immersion microscopy, an optical method with the capability for super-resolution has received a considerable amount of attention in the literature in the past few years. The main targets of the technique are lithography, pattern inspection (including critical dimension measurement) and data storage. The classical theory predicts a resolution gain proportional to the refraction index of the solid immersion lens. The intent of the paper is to prove this prediction by means of simulations and to find optimum measuring conditions. To this end, we present a very efficient, rigorous modeling method. By means of this method, we show that the inclusion of evanescent waves is crucial for the resolution gain. This is detailed with different excitation and detection schemes. Further more, we investigate the impact of polarization and different sample types.