Cross-sectional TEM study of subsurface damage in SPDT machining of germanium optics.
Cross-sectional TEM study of subsurface damage in SPDT machining of germanium optics.
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DOI：
10.1364/ao.57.001940
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发表时间：
2018-03
期刊：
影响因子：
1.9
通讯作者：
D. Korytár;Z. Zápražný;C. Ferrari;C. Frigeri;M. Jergel;I. Matko;J. Keckes
中科院分区：
文献类型：
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作者：
D. Korytár;Z. Zápražný;C. Ferrari;C. Frigeri;M. Jergel;I. Matko;J. Keckes
除了表面粗糙度和形状精度外，Ge和Si晶体光学的单点金刚石切削（SPDT）产生的亚表面损伤（SSD）越来越重要，从红外到可见光、紫外和x射线的波长越来越小。固态硬盘有多种组成部分，如微裂纹、位错、应变和近表面非晶态层，也有几种技术来评估固态硬盘的各种组成部分。横断面透射电子显微镜（XTEM）是昂贵的，不经常直接用于光学实验室。然而，由于其对固态硬盘的高灵敏度和原子分辨率，它经常被用作开发SPDT技术和其他表面处理技术的外部服务。研究表明，不适当的样品制备会产生近表面非晶化。提出了避免该伪影的措施和XTEM样品制备可靠性的检验方法。
In addition to surface roughness and shape precision, the subsurface damage (SSD) generated by single point diamond turning (SPDT) of Ge and Si crystal optics is of increasing importance with decreasing wavelength from infrared through visible, UV, and x-ray. There are various components of SSD, e.g., microcracks, dislocations, strain, and a near-surface amorphous layer, and there are also several techniques to evaluate various components of SSD. Cross-sectional transmission electron microscopy (XTEM) is expensive and not often directly used in the optics laboratory. However, because of its very high sensitivity to SSD and down to atomic resolution, it is often used as an external service for developing SPDT technology and other surface processing techniques. It is shown in the paper that improper sample preparation can generate near-surface amorphization. Measures to avoid this artifact and a test of reliability of XTEM sample preparation are proposed.