A compact and low-loss 1×8 optical power splitter using silica-based PLC on quartz substrate
A compact and low-loss 1×8 optical power splitter using silica-based PLC on quartz substrate
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DOI：
10.1016/j.optcom.2013.09.003
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发表时间：
2014-02
影响因子：
2.4
通讯作者：
Wang Liangliang;Jun-ming An;Yuan-da Wu;Jiashun Zhang;Yue Wang;Jian-guang Li;Hongjie Wang;
中科院分区：
文献类型：
--
作者：
Wang Liangliang;Jun-ming An;Yuan-da Wu;Jiashun Zhang;Yue Wang;Jian-guang Li;Hongjie Wang;
本文采用基于硅基PLC技术，在石英衬底上实现了一种结构紧凑、低损耗、均匀性好的1×8新型y支路光功率分路器。利用三维BPM对新y支路的增宽波导和过渡波导进行了优化。测量结果表明，在1.26 μm ~ 1.65 μm波长范围内，分路器的插入损耗（IL）和均匀度（UNIF）分别小于9.5 dB和0.35 dB，整体6 in的总产品比为优质级。晶圆超过95%。结果表明，我们的技术完全满足了大批量生产的需要。
In this paper, a compact, low-loss and good-uniformity 1×8 optical power splitter with new Y-branch structure is demonstrated using silica-based PLC technology on quartz substrate. Broadening waveguide and transition waveguide of the new Y-branch are optimized by using 3D BPM. The measurement results show that the insertion loss (IL) and the uniformity (UNIF) of the splitters are less than 9.5 dB and 0.35 dB, respectively, in the wavelength range from 1.26 μm to 1.65 μm, and the total product ratio of premium grade in a whole 6 in. wafer is more than 95%. The results mean that our technology completely satisfies the need of mass manufacture.