Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers
Enhanced actuation of nanocrystalline diamond microelectromechanical disk resonators with AlN layers
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DOI：
10.1063/1.4948343
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发表时间：
2016-04
影响因子：
4
通讯作者：
Taro Yoshikawa;M. Reusch;K. Holc;D. Iankov;V. Zuerbig;A. Žukauskaitė;C. Nebel;O. Ambacher;V. Lebedev
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文献类型：
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作者：
Taro Yoshikawa;M. Reusch;K. Holc;D. Iankov;V. Zuerbig;A. Žukauskaitė;C. Nebel;O. Ambacher;V. Lebedev
揭示了利用氮化铝(AlN)增强纳米晶金刚石(NCD)微电子机械系统圆盘谐振器驱动的巨大潜力。通过在电容式NCD圆盘谐振器上沉积c轴取向的AlN，制备了一种单晶片(AlN/NCD)结构圆盘谐振器。单晶片谐振器由具有相对较大的电极间隙间隔(即，大于1μm的间隔)的弯曲回音廊模式来压电驱动，尽管这对于电容式NCD盘谐振器是不可能的。这一结果可以用有限元模拟来解释，当电极间隙为0.8μm时，压电驱动比电容驱动更有效。模拟还表明，对于更高频率的工作，当谐振器尺寸缩小时，电容驱动比压电驱动更有效所需的电极间隙以指数形式减小。我们..。
A great potential of the use of aluminum nitride (AlN) to enhance the actuation of nanocrystalline diamond (NCD) microelectromechanical system disk resonators is revealed. A disk resonator with a unimorph (AlN/NCD) structure is fabricated by depositing a c-axis oriented AlN on a capacitive NCD disk resonator. The unimorph resonator is piezoelectrically actuated with flexural whispering gallery modes with a relatively large electrode gap spacing, i.e., the spacing which is greater than 1 μm, although this is not possible for the capacitive NCD disk resonator. This result is explained by a finite element method simulation where the piezoelectric actuation turns out to be more effective than the capacitive actuation when the electrode gap spacing is >0.8 μm. The simulation also shows that the electrode gap spacing required for the capacitive actuation to be more effective than the piezoelectric actuation exponentially decreases when the resonator dimension is scaled down for higher frequency operations. Our ...