Optimization of the edge extension in dwell time algorithm for ion beam figuring
Optimization of the edge extension in dwell time algorithm for ion beam figuring
复制标题
离子束成形驻留时间算法中边缘延伸的优化
DOI：
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
C. Shi
中科院分区：
文献类型：
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作者：
Liangxuan Shu;Fan Wu;C. Shi
离子束加工是在原子级去除材料的能力，抛光后的光学质量不仅取决于加工的精度，还取决于停留时间算法的精度。反卷积是确定驻留时间的常用方法，一般在计算机中通过矩阵运算来实现，因此需要将光学元件的表面图形扩展到整个矩阵。本文首先分析了置零法和高斯延拓法的不足。然后基于矩阵卷积原理提出了一种边缘扩展的优化方法，通过对工件上点的卷积来预测所需的表面形状。最后，对高斯延拓离子束成形算法和所提出的优化方法进行了仿真，结果表明，考虑内点作用的优化方法具有更好的效果，能更有效地抑制边缘效应，使算法达到更高的精度。
Ion beam figuring is capacity of removing materials at atoms, and the optical quality after polishing depends on not only the accuracy of processing but also the accuracy of dwell time algorithm. Deconvolution is a common method of determining the dwell time and it is generally carried out by matrix operations in the computer, so the surface figure of the optical component needs to be extended to cover throughout the matrix. First, this paper analyses the disadvantages of the extension by zero setting and Gaussian extension. And then based on the principle of matrix convolution an optimization method for the edge extension is proposed, which predicts the desired surface figure by the convolution of points in the workpiece. Finally, the simulations for ion beam figuring with Gauss extension and the optimization method proposed are made, and the results show that the optimization method taken into account the action of inner points has the better effect: the edge effect is suppressed more effectively and the algorithm achieves higher accuracy.