Adaptive aberration compensation for three-dimensional micro-fabrication of photonic crystals in lithium niobate
Adaptive aberration compensation for three-dimensional micro-fabrication of photonic crystals in lithium niobate
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DOI：
10.1364/oe.19.009419
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发表时间：
2011-05-09
期刊：
影响因子：
3.8
通讯作者：
Gu, Min
中科院分区：
文献类型：
--
作者：
Cumming, Benjamin P.;Jesacher, Alexander;Gu, Min
我们提出了使用液晶空间光调制器来校正高折射率铌酸锂晶体在使用低重复率放大激光直接制造三维微结构时，由折射率失配引起的球像差。通过校正基于实验测定值的像差，我们发现书写结构的尺寸急剧减小，从而可以制造出高质量的微观结构，如三维光子晶体。我们证明，通过使用自适应光学，在相应的光子晶体中，制造深度和权宜强度增加了两到三倍。(C) 2011美国光学学会
We present the use of a liquid crystal spatial light modulator to correct for the refractive-index mismatch induced spherical aberration in a high refractive-index lithium niobate crystal when a low repetition rate amplified laser is used for the direct fabrication of three-dimensional micro-structures. By correcting the aberration based on experimentally determined values, we show that the size of written structures decreases dramatically, which allows the fabrication of high quality micro-structures such as three-dimensional photonic crystals. We demonstrate that, through the use of adaptive optics, the fabrication depth and the stopgap strength in the corresponding photonic crystals are increased by a factor of two to three. (C) 2011 Optical Society of America