Vertically Coupled Silicon Nitride Microdisk Resonant Filters
Vertically Coupled Silicon Nitride Microdisk Resonant Filters
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DOI：
10.1109/lpt.2014.2358216
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发表时间：
2014-12
影响因子：
2.6
通讯作者：
Jijun Feng;R. Akimoto
中科院分区：
文献类型：
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作者：
Jijun Feng;R. Akimoto
基于多层氮化硅平台，对偏振相关垂直耦合微盘谐振滤波器进行了实验研究。在形成第一层光子电路之后，采用基于常规化学机械抛光和干法蚀刻的改进的平坦化技术来平坦化差距膜表面以用于不同的芯层沉积。该谐振腔对横向电光具有较高的品质因数（> 10 4）和较大的抑制值（>20 dB），而对横向磁波具有较弱的谐振耦合。基于当前的集成方法，可以进一步预期其他垂直耦合的多功能器件。研制了一种具有平坦通带、陡滚降和增强抑制比等上级特性的级联谐振滤波器。
Polarization-dependent vertically coupled microdisk resonant filters are experimentally demonstrated based on a multilayer silicon nitride platform. An improved planarization technique based on conventional chemical-mechanical polishing and dry-etching is adopted to flatten the gap film surface for a different core layer deposition after the first-layer photonic circuit is formed. The resonator can realize a high quality factor (> 104) and large suppression value (>20 dB) for the transverse electric light, while the transverse magnetic wave has weak resonant coupling. Other vertically coupled multifunctional devices can be further expected based on the current integration method. A cascaded resonator filter with superior characteristics, such as a flat passband, a steep roll-off, and an enhanced suppression ratio is developed.