Synthesis and characterization of TiO_2 thin films on organic self-assembled monolayers: Part I. Film formation from aqueous solutions
Synthesis and characterization of TiO_2 thin films on organic self-assembled monolayers: Part I. Film formation from aqueous solutions
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DOI：
10.1557/jmr.1995.0692
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发表时间：
1995-03
影响因子：
2.7
通讯作者：
H. Shin;R. J. Collins;M. De Guire;A. Heuer;C. Sukenik
中科院分区：
文献类型：
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作者：
H. Shin;R. J. Collins;M. De Guire;A. Heuer;C. Sukenik
在单晶硅衬底上制备了表面含有磺酸盐(-SO3H)官能团的自组装单分子膜，用于从水溶液中沉积二氧化钛薄膜。TiCl4在80°C的HCI水溶液中经2 h水解制得厚度超过50 nm的多晶二氧化钛薄膜，薄膜无孔，附着力好，均匀，由直径2~4 nm的锐钛矿晶组成。600℃以下的热处理会导致锐钛矿颗粒粗化，但不会损失附着力或结构完整性。
Self-assembled monolayers (SAMs) bearing sulfonate (-SO_3H) surface functional groups, on single-crystal Si wafers, were used as substrates for the deposition of TiO_2 thin films from aqueous solutions. Polycrystalline TiO_2 thin films over 50 nm thick formed in 2 h by hydrolysis of TiCl_4 in aqueous HCI solutions at 80 °C. The films were pore-free, showed excellent adherence and uniformity, and consisted of anatase crystallites 2–4 nm in diameter. Annealing at temperatures up to 600 °C caused coarsening of the anatase grains, but no loss of adherence or structural integrity.