Fabrication and characterization of a nanowire/polymer-based nanocomposite for a prototype thermoelectric device
Fabrication and characterization of a nanowire/polymer-based nanocomposite for a prototype thermoelectric device
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DOI：
10.1109/jmems.2004.828742
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发表时间：
2004-06-01
影响因子：
2.7
通讯作者：
Yang, PD
中科院分区：
文献类型：
--
作者：
Abramson, AR;Kim, WC;Yang, PD
本文讨论了一种新型的热电器件的设计，制造和测试包括硅纳米线阵列嵌入在聚合物基体。通过利用复合材料的低热导率和纳米线的高功率因数，应该会产生高于相应体积值的热电品质因数。阵列首先使用气-液-固（VLS）工艺合成，导致单晶纳米线的一维（1-D）生长。为了提供结构支撑，同时保持纳米线之间的热隔离，聚对二甲苯，一种低热导率和非常保形的聚合物，被嵌入在阵列内。机械抛光和氧等离子体蚀刻技术被用来暴露纳米线尖端和金属接触沉积在顶面上。扫描电子显微照片（SEM）说明了制造过程的结果。使用修改后的3 W技术，测量的纳米线矩阵的有效热导率和1 V的特性也被证明。这种纳米复合材料的高热电性能器件的适用性的评估。
This paper discusses the design, fabrication and testing of a novel thermoelectric device comprised of arrays of silicon nanowires embedded in a polymer matrix. By exploiting the low-thermal conductivity of the composite and presumably high-power factor of the nanowires, a thermoelectric figure of merit, higher than the corresponding bulk value, should result. Arrays were first synthesized using a vapor-liquid-solid (VLS) process leading to one-dimensional (1-D) growth of single-crystalline nanowires. To provide structural support while maintaining thermal isolation between nanowires, parylene, a low thermal conductivity and extremely conformal polymer, was embedded within the arrays. Mechanical polishing and oxygen plasma etching techniques were used to expose the nanowire tips and a metal contact was deposited on the top surface. Scanning electron micrographs (SEMs) illustrate the results of the fabrication processes. Using a modification of the 3w technique, the effective thermal conductivity of the nanowire matrix was measured and 1 V characteristics were also demonstrated. An assessment of the suitability of this nanocomposite for high thermoelectric performance devices is given.