Negative Nonlinear Dissipation in Microelectromechanical Beams
Negative Nonlinear Dissipation in Microelectromechanical Beams
复制标题
DOI：
10.1109/jmems.2020.3006800
复制
发表时间：
2020-10-01
影响因子：
2.7
通讯作者：
Kenny, Thomas W.
中科院分区：
文献类型：
--
作者：
Bousse, Nicholas Eric;Miller, James Marion Lehto;Kenny, Thomas W.
在这项工作中，我们提出了对密封封装中制造的双钳位微梁中存在的驱动引起的负非线性耗散的测量。我们表征了直接驱动下该系统中存在的幅频非线性和非线性耗散。在测量直接或参数驱动响应时，可以观察到非线性耗散的负面性质。通过与自由振铃响应进行比较，我们确认非线性耗散是由驱动谐振器引起的。驱动引起的非线性阻尼是在大振幅下运行的谐振传感器和振荡器的一个重要考虑因素。 [2020-0140]
In this work we present measurements of drive-induced negative nonlinear dissipation present in doubly clamped microbeams fabricated in a hermetically sealed package. We characterize the amplitude-frequency nonlinearity and nonlinear dissipation present in this system under direct drive. The negative nature of the nonlinear dissipation is observed when measuring either the directly- or parametrically-actuated response. By comparing to the free ringdown response, we confirm that the nonlinear dissipation is induced by driving the resonator. Drive-induced nonlinear damping is an important consideration for resonant sensors and oscillators operated at large amplitudes. [2020-0140]