Gas diffusion and sorption properties of polysiloxane membranes prepared by PECVD
Gas diffusion and sorption properties of polysiloxane membranes prepared by PECVD
复制标题
PECVD法制备聚硅氧烷膜的气体扩散和吸附性能
DOI：
10.1016/s0376-7388(01)00667-6
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发表时间：
2002
影响因子：
9.5
通讯作者：
J. Durand
中科院分区：
文献类型：
--
作者：
S. Roualdès;José Sánchez;J. Durand
采用低频等离子体聚合法制备了两种不同环状和线性有机硅前驱体的a- sioxcyhz薄膜。用N2、H2、co2和CH4对纤维素酯基膜的有效气体渗透膜的性能进行了测试。气体渗透性系数和扩散系数采用等容加压法测定。用石英微天平重量法测定了溶解度系数。建立了描述等离子体能量特性的复合等离子体参数V/FM （V：输入电压，F：单体流速，M：单体分子量）与等离子体聚硅氧烷膜渗透性能之间的相关关系。渗透测量表明，根据施加的等离子体能量，可以获得广泛的气体输运特性。根据与沉积参数直接相关的等离子体聚硅氧烷膜的不同结构因素（链填充密度、链柔韧性和化学成分）的相对影响，可以通过扩散或吸附机制控制整体传质。
Thin a-SiOxCyHzfilm membranes were deposited from two different cyclic and linear organosilicon precursors in a low-frequency plasma polymerization process. The qualification of the films for effective gas permeation membranes was tested on the ester of cellulose substrates using N2, H2, CO2and CH4. The gas permeability and diffusion coefficients were determined by using the constant-volume pressure-increase method. The solubility coefficients (S) were obtained by using a gravimetric method with a quartz microbalance. Correlations between the composite plasma parameter (V/FM) (V: input voltage, F: monomer flow rate and M: monomer molecular weight), which describes the energetic character of the plasma and the permeation performances of plasma polysiloxane membranes were established. Permeation measurements reveal that a wide range of gas transport properties can be obtained according to the applied plasma energy. The global mass transfer could be controlled by diffusion or sorption mechanism according to the relative influence of the different structural factors (chain packing density, chain flexibility and chemical composition) of plasma polysiloxane films directly related to deposition parameters.