Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures

Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures
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DOI:
10.1063/1.2178261
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发表时间:
2006-02
影响因子:
4
通讯作者:
F. Formanek;N. Takeyasu;Takuo Tanaka;K. Chiyoda;A. Ishikawa;S. Kawata
F. Formanek;N. Takeyasu;Takuo Tanaka;K. Chiyoda;A. Ishikawa;S. Kawata
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
F. Formanek;N. Takeyasu;Takuo Tanaka;K. Chiyoda;A. Ishikawa;S. Kawata

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本文报道了利用双光子诱导光聚合技术在复杂聚合物结构上选择性沉积金属。利用微透镜阵列在单束飞秒激光作用下产生多个光斑,制备出周期性的三维微/纳米结构。采用化学镀方法在样品表面存款一层薄的银膜。对支撑结构的载玻片表面进行化学改性以避免基底的银涂层。我们的技术能够在环境条件下生产具有任意形状的复杂金属结构。
We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electroless plating method is used to deposit a thin silver film onto the sample surface. The glass slide surface supporting the structures is chemically modified to avoid silver coating of the substrate. Our technique enables to produce complex metallic structures with arbitrary shapes under ambient conditions.