Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures
Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures
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DOI:
10.1063/1.2178261
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发表时间:
2006-02
影响因子:
4
通讯作者:
F. Formanek;N. Takeyasu;Takuo Tanaka;K. Chiyoda;A. Ishikawa;S. Kawata
中科院分区:
文献类型:
--
作者:
F. Formanek;N. Takeyasu;Takuo Tanaka;K. Chiyoda;A. Ishikawa;S. Kawata
We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electroless plating method is used to deposit a thin silver film onto the sample surface. The glass slide surface supporting the structures is chemically modified to avoid silver coating of the substrate. Our technique enables to produce complex metallic structures with arbitrary shapes under ambient conditions.