Kinetics of submonolayer and multilayer epitaxial growth
Kinetics of submonolayer and multilayer epitaxial growth
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DOI：
10.1016/0040-6090(95)06947-x
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发表时间：
1996-01-15
期刊：
影响因子：
2.1
通讯作者：
Family, F
中科院分区：
文献类型：
--
作者：
Amar, JG;Family, F
亚单层和多层外延生长的动力学的中心思想的介绍性审查其次是在该领域的一些最新发展的更详细的讨论。介绍了临界岛尺寸、岛尺寸分布的动态标度和层间扩散势垒（Ehrlich-Schwoebel势垒）的概念。的亚单层外延生长的一个现实的模型的动力学蒙特卡罗模拟的结果，并与速率方程分析和最近的实验进行比较。我们还提出了一个解析表达式的缩放的岛的大小分布作为一个函数的临界岛的大小，这与我们的模拟以及与实验相一致。我们的研究结果提供了一个定量的解释的变化的亚单层岛密度，临界岛的大小，岛的大小分布和形态作为一个函数的温度和沉积速率在最近的实验中发现。我们还提出了一个现实的多层膜生长模型，其中包括一个有限的层间扩散势垒的结果。根据反射高能电子衍射强度、表面宽度、层密度和表面形貌的模拟与实验结果的比较，讨论了确定Ehrlich-Schwoebel势垒的方法。特别是，我们发现，对于Fe/Fe（100）的层间扩散势垒是显着小于激活能的扩散平台上。
An introductory review of the central ideas in the kinetics of submonolayer and multilayer expitaxial growth is followed by a more detailed discussion of some recent developments in the field. The concepts of a critical island size, dynamical scaling of the island-size distribution, and the barrier to interlayer diffusion (Ehrlich-Schwoebel barrier) are introduced. The results of kinetic Monte Carlo simulations of a realistic model of submonolayer epitaxial growth are presented and compared with rate-equation analyses and recent experiments. We also present an analytical expression for the scaled island-size distribution as a function of the critical island size which agrees well with our simulations as well as with experiments. Our results provide a quantitative explanation for the variation of the submonolayer island density, critical island size, island-size distribution and morphology as a function of temperature and deposition rate found in recent experiments. We also present the results of a realistic model for multilayer growth which includes a finite barrier to interlayer diffusion. A method for determining the Ehrlich-Schwoebel barrier based on a comparison of simulations with experimental results for the reflection high-energy electron diffraction intensity, surface width, layer densities, and surface morphology is discussed. In particular, we find that for Fe/Fe(100) the interlayer diffusion barrier is significantly less than the activation energy for diffusion on a flat terrace.