Fabrication of titanium carbide film on bearing steel by plasma immersion ion implantation and deposition
Fabrication of titanium carbide film on bearing steel by plasma immersion ion implantation and deposition
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DOI：
10.1016/j.surfcoat.2004.03.036
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发表时间：
2004-08
影响因子：
5.4
通讯作者：
B. Tang;Hongxi Liu;Langping Wang;Xiaofeng Wang;K. Gan;Y. Yu;Yuhang Wang;T. Sun;Songyan Wang-Songyan
中科院分区：
文献类型：
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作者：
B. Tang;Hongxi Liu;Langping Wang;Xiaofeng Wang;K. Gan;Y. Yu;Yuhang Wang;T. Sun;Songyan Wang-Songyan
采用等离子体浸没离子注入和沉积（PIIID）技术在9Cr18轴承钢表面制备了碳化钛薄膜。在实验过程中，乙炔（C2H2）和钛等离子体同时产生。采用射频等离子体源产生乙炔等离子体，阴极弧等离子体源产生钛等离子体。研究了气压和偏压脉宽对薄膜性能的影响。采用X射线衍射仪、显微硬度计、销盘摩擦磨损试验机和电化学腐蚀试验机对薄膜进行了表征。XRD分析表明，薄膜中有TiC相生成。显微硬度测试结果表明，与未涂层相比，涂层的最大显微硬度提高了70.8%。此外，摩擦系数降低到约0.1，并且涂覆的基底表面的耐腐蚀性显著提高。
Titanium carbide films have been synthesized by plasma immersion ion implantation and deposition (PIIID) on 9Cr18 bearing steel. During the experiments, acetylene (C2H2) and titanium plasmas were generated simultaneously. Acetylene plasma was produced by a radio-frequency plasma source, and titanium plasma was generated by cathodic arc plasma source. Influences of gas pressure and pulse width of the bias voltage on properties of the thin film were investigated. The as-deposited films were characterized by X-ray diffraction (XRD), micro-hardness tester, pin-on-disc tribological facility and electrochemistry corrosion equipment. XRD pattern proves that TiC phase is formed in the film. Compared with uncoated substrates, micro-hardness results reveal that the maximum micro-hardness is increased by 70.8%. In addition, the friction coefficient decreases to about 0.1, and the corrosion resistance of coated substrate surfaces is improved significantly.