Effects of Substrate Heating on Al Doping Performed by Irradiating Laser Beam to Al Film on 4H-SiC
Effects of Substrate Heating on Al Doping Performed by Irradiating Laser Beam to Al Film on 4H-SiC
复制标题
基片加热对4H-SiC上Al薄膜激光照射Al掺杂的影响
DOI：
--
复制
发表时间：
2016
期刊：
影响因子：
--
通讯作者：
T. Asano
中科院分区：
文献类型：
--
作者：
A. Ikeda;R. Tsutsui;R. Sumina;H. Ikenoue;T. Asano
