Study on the composite dispersion model of optical constants of metal-oxide films in the range from ultraviolet to near infrared
Study on the composite dispersion model of optical constants of metal-oxide films in the range from ultraviolet to near infrared
复制标题
紫外至近红外范围内金属氧化物薄膜光学常数复合色散模型研究
DOI：
10.1016/j.ijleo.2018.05.019
复制
发表时间：
2018
期刊：
影响因子：
3.1
通讯作者：
Chen Deying
中科院分区：
文献类型：
--
作者：
Wang Lishuan;Liu Huasong;Li Shida;Jiang Chenghui;Ji Yiqin;Chen Deying
金属氧化物薄膜作为重要的高折射率材料，广泛应用于从紫外到近红外的镀膜技术中。薄膜的光学常数（折射率和消光系数）和带隙特性对于光学多层膜的设计和应用至关重要。在Tauc-Lorentz和Cody-Lorentz色散模型的基础上，研究了用于紫外-近红外波段光学常数反演的复合模型。提出了更合理地将带间跃迁吸收与透明区吸收联系起来的方法。解决了采用单一物理色散模型所带来的透明区弱吸收表征和带隙附近吸收阶跃截止等问题。采用离子束溅射法制备了HfO 2和Ta 2 O 5两种薄膜。以薄膜的反射光谱和透射光谱作为反演对象，利用所建立的模型反演了薄膜的光学常数。并与单一物理扩散模型进行了比较。结果表明，所建立的光学常数物理色散模型在紫外到近红外范围内具有明确的物理意义和通用性。
Metal-oxide films as important high refractive index material are widely used in coating technology from ultraviolet to near infrared region. The optical constants (refractive index and extinction coefficient) and band gap properties of the films are essential for the optical multilayer design and applications. Based on the Tauc-Lorentz and Cody-Lorentz dispersion models, the composite model for the inverse calculation of optical constants from ultraviolet to near infrared region was studied. The method is proposed to link up the interband transition absorption and transparent region absorption more reasonably. Problems such as the characterization of weak absorption in transparent region and the step cutoff of the absorption near band gap, which were caused by using single physical dispersion model, were solved. Two kinds of films (HfO2 films and Ta2O5 films) were prepared by ion beam sputtering. Reflectance and transmittance spectra of the prepared films were used as the complex object for inversion calculation of the optical constants by the developed model. The performance of the fitness was compared with that of single physical dispersion model. Results show that the developed physical dispersion model of optical constants has a explicit physical meaning and versatility in the range from ultraviolet to near infrared region.