A Study on Ekman Spirals on a Rotating Disk in Spin Coating System (Influences of the exhaust flows on Ekman spirals)

A Study on Ekman Spirals on a Rotating Disk in Spin Coating System (Influences of the exhaust flows on Ekman spirals)
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旋涂系统转盘上埃克曼螺旋的研究(排气流量对埃克曼螺旋的影响)

DOI:
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发表时间:
2005
期刊:
Proceedings of the 6th KSME-JSME Thermal and Fluids Engineering Conference tfec6-085(in press)
影响因子:
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通讯作者:
Seiichi KIMURA
Seiichi KIMURA
中科院分区:
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文献类型:
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作者:
谷野忠和;仲尾晋一郎;上林源樹;Seiichi KIMURA

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